By Michael Quinten
A one-stop, concise advisor on opting for and measuring skinny movie thickness by way of optical methods.
This useful booklet covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness dimension, and smooth purposes. In so doing, it indicates the services and possibilities of optical thickness choice and discusses the strengths and weaknesses of size units besides their assessment methods.
Following an creation to the subject, bankruptcy 2 offers the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and topic. the most subject of this booklet, the decision of the thickness of a layer in a layer stack by way of measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of business functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.
Aimed at business and educational researchers, engineers, builders and brands thinking about all components of optical layer and skinny optical movie size and metrology, procedure keep an eye on, real-time tracking, and applications.
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Additional resources for A Practical Guide to Optical Metrology for Thin Films
A Practical Guide to Optical Metrology for Thin Films by Michael Quinten